This book shows that with the use of metamaterials, one can have coherent THz signal generation, amplification, transmission, and detection for phase-arrayed CMOS transistors with significantly improved performance. Offering detailed coverage from device to system, the book describes the design and application of metamaterials in actual CMOS integrated circuits, includes real circuit examples and chip demonstrations with measurement results, and also evaluates system performance after CMOS-based system-on-chip integration. The book reflects the latest research progress and provides a state-of-the-art reference on CMOS-based metamaterial devices and mm-wave and THz systems.